Use the ZEISS MERLIN FE-SEM to investigate nano materials, semiconductor samples, minerals, steels or alloys with a range of application specific options.
Use the SEM/AFM (Atomic Force Microscopy) Hybrid option and get information on your semiconductor and nano materials samples at atomic resolution. Map large samples areas for design verification of semiconductor structures with the ATLAS large area mapping module. Explore non-conducting samples such as minerals, ceramics, glass and polymers with no compromises in beam voltage, detection and analytics due to the charge compensation by localized variable pressure.
Conveniently comprehend the topography and surface roughness of MEMS devices, nano structures, indentations for hardness measurements, or scratch marks in forensic investigations with real time 3DSM imaging module. The unique lens design image magnetic samples with no image distortions.
The ZEISS MERLIN complete detection system with the energy selective backscattered (EsB) on axis detection is ideally suited to reveal compositional details in nanocomposits, polymers, high strength steels and semiconductor structures.
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